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1 Ergebnisse
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H 2 Plasma and PMA Effects on PEALD-Al 2 O 3 Films with Dif..:
Jehyun An
;
Kyeongkeun Choi
;
Jongseo Park
...
https://www.mdpi.com/2079-4991/13/4/731. , 2023
Link:
https://doi.org/10.3390/nano13040731
RT Journal T1
H 2 Plasma and PMA Effects on PEALD-Al 2 O 3 Films with Different O 2 Plasma Exposure Times for CIS Passivation Layers
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:c12a845cacd04989849dfd0fd8433f38&Exemplar=1&LAN=DE A1 Jehyun An A1 Kyeongkeun Choi A1 Jongseo Park A1 Bohyeon Kang A1 Hyunseo You A1 Sungmin Ahn A1 Rockhyun Baek PB MDPI AG YR 2023 K1 high-k gate dielectric K1 Al 2 O 3 K1 H 2 plasma treatment K1 interface trap K1 plasma-enhanced atomic layer deposition K1 Chemistry K1 QD1-999 JF https://www.mdpi.com/2079-4991/13/4/731 LK http://dx.doi.org/https://doi.org/10.3390/nano13040731 DO https://doi.org/10.3390/nano13040731 SF ELIB - SuUB Bremen
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