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A holistic X-ray analytical approach to support sensor desi..:
A. Borzì
;
R. Zboray
;
S. Dolabella
...
http://www.sciencedirect.com/science/article/pii/S0264127521006079. , 2021
Link:
https://doi.org/10.1016/j.matdes.2021.110052
RT Journal T1 <Title>A holistic X-ray analytical approach to support sensor design and fabrication: Strain and cracking analysis for wafer bonding processes</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:c50e81132cb746d09fe3d316a29b79f7&Exemplar=1&LAN=DE A1 A. Borzì A1 R. Zboray A1 S. Dolabella A1 J.F. Le Neal A1 P. Drljaca A1 G. Fiorucci A1 A. Dommann A1 A. Neels PB Elsevier YR 2021 K1 High-resolution X-ray diffraction K1 X-ray micro computed-tomography K1 Wafer bonding K1 crystal microstructure degradation K1 Stress in crystals K1 Materials of engineering and construction. Mechanics of materials K1 TA401-492 JF http://www.sciencedirect.com/science/article/pii/S0264127521006079 LK http://dx.doi.org/https://doi.org/10.1016/j.matdes.2021.110052 DO https://doi.org/10.1016/j.matdes.2021.110052 SF ELIB - SuUB Bremen
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