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1 Ergebnisse
1
MoS2 Synthesized by Atomic Layer Deposition as Cu Diffusion..:
Johanna (Sanne) H. Deijkers
;
Arthur A. deJong
;
Miika J. Mattinen
...
https://doi.org/10.1002/admi.202202426. , 2023
Link:
https://doi.org/10.1002/admi.202202426
RT Journal T1
MoS2 Synthesized by Atomic Layer Deposition as Cu Diffusion Barrier
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:cf0691abe86647728518a52e4199b94c&Exemplar=1&LAN=DE A1 Johanna (Sanne) H. Deijkers A1 Arthur A. deJong A1 Miika J. Mattinen A1 Jeff J. P. M. Schulpen A1 Marcel A. Verheijen A1 Hessel Sprey A1 Jan Willem Maes A1 Wilhelmus (Erwin) M. M. Kessels A1 Ageeth A. Bol A1 Adriaan J. M. Mackus PB Wiley-VCH YR 2023 K1 atomic layer deposition K1 back‐end‐of‐line K1 Cu diffusion barrier K1 MoS 2 K1 time‐dependent dielectric breakdown K1 Physics K1 QC1-999 K1 Technology K1 T JF https://doi.org/10.1002/admi.202202426 LK http://dx.doi.org/https://doi.org/10.1002/admi.202202426 DO https://doi.org/10.1002/admi.202202426 SF ELIB - SuUB Bremen
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