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1 Ergebnisse
1
Feasibility Investigation of Amorphous Silicon as Release L..:
Chuan-An Cheng
;
Yu-Hsiang Huang
;
Chien-Hung Lin
...
https://ieeexplore.ieee.org/document/7837582/. , 2017
Link:
https://doi.org/10.1109/JEDS.2017.2661479
RT Journal T1
Feasibility Investigation of Amorphous Silicon as Release Layer in Temporary Bonding for 3-D Integration and FOWLP Scheme
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:d38f78abb425406c92df1743e421e7f2&Exemplar=1&LAN=DE A1 Chuan-An Cheng A1 Yu-Hsiang Huang A1 Chien-Hung Lin A1 Chia-Lin Lee A1 Shan-Chun Yang A1 Kuan-Neng Chen PB IEEE YR 2017 K1 Three-dimensional integration K1 temporary bonding K1 laser release K1 Electrical engineering. Electronics. Nuclear engineering K1 TK1-9971 JF https://ieeexplore.ieee.org/document/7837582/ LK http://dx.doi.org/https://doi.org/10.1109/JEDS.2017.2661479 DO https://doi.org/10.1109/JEDS.2017.2661479 SF ELIB - SuUB Bremen
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