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1 Ergebnisse
1
Effect of annealing conditions on dopants activation and st..:
Tai-Chen Kuo
;
Kai-Jyun Jhong
;
Chia-Wei Lin
.
http://dx.doi.org/10.1063/1.5053237. , 2019
Link:
https://doi.org/10.1063/1.5053237
RT Journal T1
Effect of annealing conditions on dopants activation and stress conservation in silicon-germanium
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:db50948c99d44e9b9a8b413fcfbf3744&Exemplar=1&LAN=DE A1 Tai-Chen Kuo A1 Kai-Jyun Jhong A1 Chia-Wei Lin A1 Wen-Hsi Lee PB AIP Publishing LLC YR 2019 K1 Physics K1 QC1-999 JF http://dx.doi.org/10.1063/1.5053237 LK http://dx.doi.org/https://doi.org/10.1063/1.5053237 DO https://doi.org/10.1063/1.5053237 SF ELIB - SuUB Bremen
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