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1 Ergebnisse
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Chemically controlled megasonic cleaning of patterned struc..:
Bichitra Nanda Sahoo
;
So Young Han
;
Hyun-Tae Kim
...
http://www.sciencedirect.com/science/article/pii/S1350417721004016. , 2022
Link:
https://doi.org/10.1016/j.ultsonch.2021.105859
RT Journal T1
Chemically controlled megasonic cleaning of patterned structures using solutions with dissolved gas and surfactant
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:eb5c37e08077416b8d0e1614767cc735&Exemplar=1&LAN=DE A1 Bichitra Nanda Sahoo A1 So Young Han A1 Hyun-Tae Kim A1 Keita Ando A1 Tae-Gon Kim A1 Bong-Kyun Kang A1 Andreas Klipp A1 Nagendra Prasad Yerriboina A1 Jin-Goo Park PB Elsevier YR 2022 K1 Megasonic cleaning K1 Particle removal K1 Acoustic bubble cavitation K1 Pattern damage K1 Dissolved gas K1 Surfactant K1 Chemistry K1 QD1-999 K1 Acoustics. Sound K1 QC221-246 JF http://www.sciencedirect.com/science/article/pii/S1350417721004016 LK http://dx.doi.org/https://doi.org/10.1016/j.ultsonch.2021.105859 DO https://doi.org/10.1016/j.ultsonch.2021.105859 SF ELIB - SuUB Bremen
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