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Molecular Modeling of EUV Photoresist Revealing the Effect ..:
Juhae Park
;
Sung-Gyu Lee
;
Yannick Vesters
...
https://www.mdpi.com/2073-4360/11/12/1923. , 2019
Link:
https://doi.org/10.3390/polym11121923
RT Journal T1
Molecular Modeling of EUV Photoresist Revealing the Effect of Chain Conformation on Line-Edge Roughness Formation
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:ec84140b63ef49f8b0c3bd8c581f0cfb&Exemplar=1&LAN=DE A1 Juhae Park A1 Sung-Gyu Lee A1 Yannick Vesters A1 Joren Severi A1 Myungwoong Kim A1 Danilo De Simone A1 Hye-Keun Oh A1 Su-Mi Hur PB MDPI AG YR 2019 K1 euv photoresist K1 line-edge roughness K1 coarse-grained model K1 molecular simulation K1 Organic chemistry K1 QD241-441 JF https://www.mdpi.com/2073-4360/11/12/1923 LK http://dx.doi.org/https://doi.org/10.3390/polym11121923 DO https://doi.org/10.3390/polym11121923 SF ELIB - SuUB Bremen
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