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1 Ergebnisse
1
Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Pattern..:
Marta Maria Kluba
;
Jian Li
;
Katja Parkkinen
...
https://www.mdpi.com/2072-666X/12/4/414. , 2021
Link:
https://doi.org/10.3390/mi12040414
RT Journal T1
Cavity-BOX SOI: Advanced Silicon Substrate with Pre-Patterned BOX for Monolithic MEMS Fabrication
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:f3dc54066ccf491b82c23ad6755919ee&Exemplar=1&LAN=DE A1 Marta Maria Kluba A1 Jian Li A1 Katja Parkkinen A1 Marcus Louwerse A1 Jaap Snijder A1 Ronald Dekker PB MDPI AG YR 2021 K1 SOI substrate K1 cavity-SOI K1 cavity-BOX K1 patterned BOX K1 buried hard-etch mask K1 Flex to Rigid (F2R) K1 Mechanical engineering and machinery K1 TJ1-1570 JF https://www.mdpi.com/2072-666X/12/4/414 LK http://dx.doi.org/https://doi.org/10.3390/mi12040414 DO https://doi.org/10.3390/mi12040414 SF ELIB - SuUB Bremen
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