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1 Ergebnisse
1
Compact Ga 2 O 3 Thin Films Deposited by Plasma Enhanced At..:
Yue Yang
;
Xiao-Ying Zhang
;
Chen Wang
...
https://www.mdpi.com/2079-4991/12/9/1510. , 2022
Link:
https://doi.org/10.3390/nano12091510
RT Journal T1
Compact Ga 2 O 3 Thin Films Deposited by Plasma Enhanced Atomic Layer Deposition at Low Temperature
UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:f4b12a2d6222432485c5b0bab2d22868&Exemplar=1&LAN=DE A1 Yue Yang A1 Xiao-Ying Zhang A1 Chen Wang A1 Fang-Bin Ren A1 Run-Feng Zhu A1 Chia-Hsun Hsu A1 Wan-Yu Wu A1 Dong-Sing Wuu A1 Peng Gao A1 Yu-Jiao Ruan A1 Shui-Yang Lien A1 Wen-Zhang Zhu PB MDPI AG YR 2022 K1 Ga 2 O 3 thin film K1 substrate temperature K1 atomic layer deposition K1 Chemistry K1 QD1-999 JF https://www.mdpi.com/2079-4991/12/9/1510 LK http://dx.doi.org/https://doi.org/10.3390/nano12091510 DO https://doi.org/10.3390/nano12091510 SF ELIB - SuUB Bremen
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