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1 Ergebnisse
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Adjustment Method of MEMS Dual-Cantilever Deflection Using ..:
Masaru Tanaka
;
Yota Iijima
;
Yusuke Masuda
..
https://www.mdpi.com/2079-9292/12/14/3153. , 2023
Link:
https://doi.org/10.3390/electronics12143153
RT Journal T1 <Title>Adjustment Method of MEMS Dual-Cantilever Deflection Using Plastic Deformation of Al and Ni Thin Film by Thermal Annealing</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftdoajarticles:oai:doaj.org_article:f9472a9ff64f4b05aaaa89018a408560&Exemplar=1&LAN=DE A1 Masaru Tanaka A1 Yota Iijima A1 Yusuke Masuda A1 Tsubasa Sato A1 Takashi Mineta PB MDPI AG YR 2023 K1 deflection adjustment K1 film stress K1 Al thin film K1 Ni thin film K1 plastic deformation K1 dual AFM cantilever K1 Electronics K1 TK7800-8360 JF https://www.mdpi.com/2079-9292/12/14/3153 LK http://dx.doi.org/https://doi.org/10.3390/electronics12143153 DO https://doi.org/10.3390/electronics12143153 SF ELIB - SuUB Bremen
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