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Exploration of co-sputtered Ta₂O₅–ZrO₂ thin films for gravi..:

Abernathy, M ; Amato, A ; Ananyeva, A...
https://publications.polymtl.ca/9309/1/2021_Abernathy_Exploration_co-sputtered_Ta2O5%E2%80%93ZrO2_thin_films.pdf.  , 2021