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Automation of a dual ion beam sputtering system for optical..:
Menchini, Francesca
;
Di Sarcina, Ilaria
;
Scaglione, Salvatore
journal:COMITATO NAZIONALE PER LA RICERCA E PER LO SVILUPPO DELL'ENERGIA NUCLEARE E DELLE ENERGIE ALTERNATIVE. ENEA-RT/DISP. , 2012
Link:
https://hdl.handle.net/20.500.12079/6646
RT Journal T1 <Title>Automation of a dual ion beam sputtering system for optical applications</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftenea:oai:iris.enea.it:20.500.12079_6646&Exemplar=1&LAN=DE A1 Menchini, Francesca A1 Di Sarcina, Ilaria A1 Scaglione, Salvatore PB ENEA YR 2012 K1 Dual Ion Beam Sputtering K1 deposition parameter K1 LabVIEW K1 automation JF journal:COMITATO NAZIONALE PER LA RICERCA E PER LO SVILUPPO DELL'ENERGIA NUCLEARE E DELLE ENERGIE ALTERNATIVE. ENEA-RT/DISP LK http://dx.doi.org/https://hdl.handle.net/20.500.12079/6646 DO https://hdl.handle.net/20.500.12079/6646 SF ELIB - SuUB Bremen
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