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1 Ergebnisse
1
Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors..:
Zhifu Feng
;
Damiano Giubertoni
;
Alessandro Cian
...
info:eu-repo/semantics/altIdentifier/pmid/38004917. , 2023
Link:
https://hdl.handle.net/11582/343427
RT Journal T1
Nano Hotplate Fabrication for Metal Oxide-Based Gas Sensors by Combining Electron Beam and Focused Ion Beam Lithography
UL https://suche.suub.uni-bremen.de/peid=base-ftfbkssleriris:oai:cris.fbk.eu:11582_343427&Exemplar=1&LAN=DE A1 Zhifu Feng A1 Damiano Giubertoni A1 Alessandro Cian A1 Matteo Valt A1 Mario Barozzi A1 Andrea Gaiardo A1 Vincenzo Guidi YR 2023 K1 electron beam lithography K1 focused ion beam K1 gas sensor K1 ion beam lithography K1 nano heater K1 power consumption JF info:eu-repo/semantics/altIdentifier/pmid/38004917 LK http://dx.doi.org/https://hdl.handle.net/11582/343427 DO https://hdl.handle.net/11582/343427 SF ELIB - SuUB Bremen
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