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1 Ergebnisse
1
Damascene versus subtractive line CMP process for resistive..:
Dawant, Raphaël
;
Gaudreau, Matthieu
;
Roy, Marc-Antoine
...
info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mne.2024.100251. , 2024
Link:
https://hal.science/hal-04607951
RT Journal T1
Damascene versus subtractive line CMP process for resistive memory crossbars BEOL integration
UL https://suche.suub.uni-bremen.de/peid=base-ftinsalyonhal:oai:HAL:hal-04607951v1&Exemplar=1&LAN=DE A1 Dawant, Raphaël A1 Gaudreau, Matthieu A1 Roy, Marc-Antoine A1 Mouny, Pierre-Antoine A1 Valdenaire, Matthieu A1 Gliech, Pierre A1 Arias-Zapata, Javier A1 Zegaoui, Malek A1 Alibart, F A1 Drouin, Dominique A1 Ecoffey, Serge PB HAL CCSD; Elsevier YR 2024 K1 CMP K1 Resistive memory K1 Crossbar array K1 Damascene K1 Subtractive line K1 BEOL K1 Integration K1 [PHYS]Physics [physics] K1 [SPI]Engineering Sciences [physics] JF info:eu-repo/semantics/altIdentifier/doi/10.1016/j.mne.2024.100251 LK http://dx.doi.org/https://hal.science/hal-04607951 DO https://hal.science/hal-04607951 SF ELIB - SuUB Bremen
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