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1 Ergebnisse
1
Development and fabrication of vertical thin film transisto..:
Zhang, Peng
NNT: 2012REN1S156. , 2012
Link:
https://theses.hal.science/tel-00815161
RT Journal T1
Development and fabrication of vertical thin film transistors based on low temperature polycrystalline silicon technology ; Développement et fabrication de transistors couches minces verticaux en technologie silicium polycristallin basse température
UL https://suche.suub.uni-bremen.de/peid=base-ftinsarennhal:oai:HAL:tel-00815161v1&Exemplar=1&LAN=DE A1 Zhang, Peng PB HAL CCSD YR 2012 K1 vertical thin film transistors (VTFTs) K1 polycrystalline silicon K1 low pressure chemical vapor deposition (LPCVD) K1 plasma etching K1 transistors couches minces verticaux K1 silicium polycristallin K1 dépôt chimique en phase vapeur à basse pression K1 gravure plasma K1 [SPI.TRON]Engineering Sciences [physics]/Electronics JF NNT: 2012REN1S156 LK http://dx.doi.org/https://theses.hal.science/tel-00815161 DO https://theses.hal.science/tel-00815161 SF ELIB - SuUB Bremen
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