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1 Ergebnisse
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Comparision of in situ spectroscopic ellipsometer and ex si..:
Özyüzer, Lütfi
;
Aygün, Gülnur
;
Cantaş, Ayten
Materials Research Express. , 2018
Link:
http://hdl.handle.net/11147/7123
RT Journal T1
Comparision of in situ spectroscopic ellipsometer and ex situ x-ray photoelectron spectroscopy depth profiling analysis of HfO2/Hf/Si multilayer structure
UL https://suche.suub.uni-bremen.de/peid=base-ftiztech:oai:gcris.iyte.edu.tr:11147_7123&Exemplar=1&LAN=DE A1 Özyüzer, Lütfi A1 Aygün, Gülnur A1 Cantaş, Ayten PB IOP Publishing Ltd. YR 2018 K1 FTIR K1 High-k dielectric material K1 Multilayer structures K1 Spectroscopic Ellipsometry K1 Reactive RF sputtering JF Materials Research Express LK http://hdl.handle.net/11147/7123 DO http://hdl.handle.net/11147/7123 SF ELIB - SuUB Bremen
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