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1 Ergebnisse
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Basic approaches to photoresist mask formation modeling in ..:
N. N. Balan
;
V. V. Ivanov
;
A. V. Kuzovkov
...
https://met.misis.ru/jour/article/view/359/297. , 2020
Link:
https://met.misis.ru/jour/article/view/359
RT Journal T1
Basic approaches to photoresist mask formation modeling in computational lithography ; Основные подходы к моделированию формирования фоторезистивной маски в вычислительной литографии
UL https://suche.suub.uni-bremen.de/peid=base-ftjmee:oai:oai.mateltech.elpub.ru:article_359&Exemplar=1&LAN=DE A1 N. N. Balan A1 V. V. Ivanov A1 A. V. Kuzovkov A1 E. V. Sokolova A1 E. S. Shamin A1 Н. Н. Балан A1 В. В. Иванов A1 А. В. Кузовков A1 Е. В. Соколова A1 Е. С. Шамин PB MISiS YR 2020 K1 кластеризация методом k-средних K1 projection photolithography K1 VT5 K1 CM1 K1 k-means clustering K1 проекционная фотолитография JF https://met.misis.ru/jour/article/view/359/297 LK http://dx.doi.org/https://met.misis.ru/jour/article/view/359 DO https://met.misis.ru/jour/article/view/359 SF ELIB - SuUB Bremen
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