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1 Ergebnisse
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Creattion of silicon-carbon films by induction assisted pla..:
A. A. Temirov
;
I. V. Kubasov
;
A. V. Turutin
...
Meškinis Š., Tamulevičienė A. Structure, properties and applications of diamond like nanocomposite (SiOx containing DLC) films: A review. Materials Science. 2011; 17(4): 358—370. https://doi.org/10.5755/j01.ms.17.4.770. , 2023
Link:
https://met.misis.ru/jour/article/view/564
RT Journal T1
Creattion of silicon-carbon films by induction assisted plasma chemical deposition ; Получение кремний-углеродных пленок методом плазмохимического осаждения с индукционным ассистированием
UL https://suche.suub.uni-bremen.de/peid=base-ftjmee:oai:oai.mateltech.elpub.ru:article_564&Exemplar=1&LAN=DE A1 A. A. Temirov A1 I. V. Kubasov A1 A. V. Turutin A1 T. S. Ilina A1 A. M. Kislyuk A1 D. A. Kiselev A1 E. A. Skryleva A1 N. A. Sobolev A1 I. A. Salimon A1 N. V. Batrameev A1 M. D. Malinkovich A1 Yu. N. Parkhomenko A1 А. А. Темиров A1 И. В. Кубасов A1 А. В. Турутин A1 Т. С. Ильина A1 А. М. Кислюк A1 Д. А. Киселев A1 Е. А. Скрылева A1 Н. А. Соболев A1 И. А. Салимон A1 Н. В. Батрамеев A1 М. Д. Малинкович A1 Ю. Н. Пархоменко PB MISIS YR 2023 K1 технологии тонких пленок K1 diamond-like materials K1 plasma chemical deposition K1 thin film technology K1 алмазоподобные материалы K1 плазмохимическое осаждение JF Meškinis Š., Tamulevičienė A. Structure, properties and applications of diamond like nanocomposite (SiOx containing DLC) films: A review. Materials Science. 2011; 17(4): 358—370. https://doi.org/10.5755/j01.ms.17.4.770 LK http://dx.doi.org/https://met.misis.ru/jour/article/view/564 DO https://met.misis.ru/jour/article/view/564 SF ELIB - SuUB Bremen
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