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Deposit of AlN thin films by nitrogen reactive pulsed laser..:
Chale-Lara, F
;
Zapata-Torres, M
;
Caballero-Briones, F
...
https://rmf.smf.mx/ojs/rmf/article/view/Vol.%2065,%20Issue%204,%20pp.%20345-350/4348. , 2019
Link:
https://rmf.smf.mx/ojs/rmf/article/view/Vol.%2065,%20I..
RT Journal T1 <Title>Deposit of AlN thin films by nitrogen reactive pulsed laser ablation using an Al target</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftjrmfojs:oai:ojs.rmf.smf.mx:article_496&Exemplar=1&LAN=DE A1 Chale-Lara, F A1 Zapata-Torres, M A1 Caballero-Briones, F A1 de la Cruz, W A1 Cruz Gonzalez, N A1 Huerta Escamilla, C A1 Farias Sanchez, and M.H PB Sociedad Mexicana de Física YR 2019 K1 AlN thin films K1 Pulsed laser deposition K1 XPS JF https://rmf.smf.mx/ojs/rmf/article/view/Vol.%2065,%20Issue%204,%20pp.%20345-350/4348 LK http://dx.doi.org/https://rmf.smf.mx/ojs/rmf/article/view/Vol.%2065,%20Issue%204,%20pp.%20345-350 DO https://rmf.smf.mx/ojs/rmf/article/view/Vol.%2065,%20Issue%204,%20pp.%20345-350 SF ELIB - SuUB Bremen
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