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Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/..:
Rontu, Ville
;
Sippola, Perttu
;
Broas, Mikael
...
Journal of Vacuum Science and Technology A. , 2018
Link:
http://urn.fi/URN:NBN:fi:jyu-201801241317
RT Journal T1
Atomic layer deposition of AlN from AlCl3 using NH3 and Ar/NH3 plasma
UL https://suche.suub.uni-bremen.de/peid=base-ftjyvaeskylaenun:oai:jyx.jyu.fi:123456789_56914&Exemplar=1&LAN=DE A1 Rontu, Ville A1 Sippola, Perttu A1 Broas, Mikael A1 Ross, Glenn A1 Sajavaara, Timo A1 Lipsanen, Harri A1 Paulasto-Kröckel, Mervi A1 Franssila, Sami PB AIP Publishing YR 2018 K1 crystal structure K1 piezoelectric films K1 optiset ominaisuudet K1 ihotautioppi K1 atomikerroskasvatus JF Journal of Vacuum Science and Technology A LK http://urn.fi/URN:NBN:fi:jyu-201801241317 DO http://urn.fi/URN:NBN:fi:jyu-201801241317 SF ELIB - SuUB Bremen
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