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1 Ergebnisse
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Phosphites as precursors in atomic layer deposition thin fi..:
Kvamme, Kristian B
;
Ruud, Amund
;
Weibye, Kristian
..
Journal of Vacuum Science and Technology A. , 2021
Link:
http://urn.fi/URN:NBN:fi:jyu-202103161978
RT Journal T1
Phosphites as precursors in atomic layer deposition thin film synthesis
UL https://suche.suub.uni-bremen.de/peid=base-ftjyvaeskylaenun:oai:jyx.jyu.fi:123456789_74637&Exemplar=1&LAN=DE A1 Kvamme, Kristian B A1 Ruud, Amund A1 Weibye, Kristian A1 Sajavaara, Timo A1 Nilsen, Ola PB American Institute of Physics YR 2021 K1 fosfiitit K1 atomikerroskasvatus K1 ohutkalvot K1 fosfaatit JF Journal of Vacuum Science and Technology A LK http://urn.fi/URN:NBN:fi:jyu-202103161978 DO http://urn.fi/URN:NBN:fi:jyu-202103161978 SF ELIB - SuUB Bremen
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