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Amorphous carbon active contact layer for reliable nanoelec..:

Grogg, Daniel ; Ayala, Christopher L ; Drechsler, Ute...
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1084-6999. , 2014

Link: http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-14550

RT Journal
T1 <Title>Amorphous carbon active contact layer for reliable nanoelectromechanical switches</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftkthstockholm:oai:DiVA.org:kth-145507&Exemplar=1&LAN=DE
				
A1 Grogg, Daniel
A1 Ayala, Christopher L
A1 Drechsler, Ute
A1 Sebastian, A
A1 Koelmans, W. W
A1 Bleiker, Simon J
A1 Fernandez-Bolanos, Montserrat
A1 Hagleitner, Christoph
A1 Despont, Michel
A1 Duerig, Urs T
PB KTH, Mikro- och nanosystemteknik
YR 2014
K1 Amorphous carbon
K1 Amorphous carbon (a-C)
K1 Conducting filament
K1 High reliability
K1 Mechanical relays
K1 Nano-electromechanical
K1 Nanoelectromechanical switches
K1 Nanoscale contacts
K1 Switching cycles
K1 MEMS
K1 Other Electrical Engineering
K1 Electronic Engineering
K1 Information Engineering
K1 Annan elektroteknik och elektronik
JF Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 1084-6999
LK http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-145507
DO http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-145507
SF ELIB - SuUB Bremen

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