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1 Ergebnisse
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Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Di..:
Jo, Gaehun
;
Edinger, Pierre
;
Bleiker, Simon J
...
orcid:0000-0002-2752-7422. , 2022
Link:
http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-32207
RT Journal T1
Wafer-level Hermetic Sealing of Silicon Photonic MEMS by Direct Metal-to-Metal Bonding
UL https://suche.suub.uni-bremen.de/peid=base-ftkthstockholm:oai:DiVA.org:kth-322074&Exemplar=1&LAN=DE A1 Jo, Gaehun A1 Edinger, Pierre A1 Bleiker, Simon J A1 Wang, Xiaojing A1 Takabayashi, Alain Yuji A1 Sattari, Hamed A1 Quack, Niels A1 Jezzini, Moises A1 Lee, Jun Su A1 Malik, Arun Kumar A1 Verheyen, Peter A1 Zand, Iman A1 Khan, Umar A1 Bogaerts, Wim A1 Stemme, Göran A1 Gylfason, Kristinn A1 Niklaus, Frank PB KTH, Mikro- och nanosystemteknik YR 2022 K1 Si photonics K1 MEMS K1 Hermetic sealing K1 Wafer-level vacuum packaging K1 Other Electrical Engineering K1 Electronic Engineering K1 Information Engineering K1 Annan elektroteknik och elektronik JF orcid:0000-0002-2752-7422 LK http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-322074 DO http://urn.kb.se/resolve?urn=urn:nbn:se:kth:diva-322074 SF ELIB - SuUB Bremen
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