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Experimental benchmark of kinetic simulations of capacitive..:
Donkó, Zoltán
;
Derzsi, Aranka
;
Korolov, Ihor
...
https://eprints.whiterose.ac.uk/122844/1/Donko2017.pdf. , 2018
Link:
https://eprints.whiterose.ac.uk/122844/
RT Journal T1
Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
UL https://suche.suub.uni-bremen.de/peid=base-ftleedsuniv:oai:eprints.whiterose.ac.uk:122844&Exemplar=1&LAN=DE A1 Donkó, Zoltán A1 Derzsi, Aranka A1 Korolov, Ihor A1 Hartmann, Peter A1 Brandt, Steven A1 Schulze, Julian A1 Burger, Birk A1 Koepke, Mark A1 Bruneau, Bastien A1 Johnson, Erik V A1 Lafleur, Trevor A1 Booth, Jean-Paul A1 Gibson, Andrew Robert A1 O'Connell, Deborah A1 Gans, Timo YR 2018 JF https://eprints.whiterose.ac.uk/122844/1/Donko2017.pdf LK http://dx.doi.org/https://eprints.whiterose.ac.uk/122844/ DO https://eprints.whiterose.ac.uk/122844/ SF ELIB - SuUB Bremen
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