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1 Ergebnisse
1
Determining role of W+ ions in the densification of TiAlWN ..:
Li, Xiao
;
Petrov, Ivan
;
Hultman, Lars
.
Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2023, 41:1,. , 2023
Link:
http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-19118
RT Journal T1
Determining role of W+ ions in the densification of TiAlWN thin films grown by hybrid HiPIMS/DCMS technique with no external heating
UL https://suche.suub.uni-bremen.de/peid=base-ftlinkoepinguniv:oai:DiVA.org:liu-191188&Exemplar=1&LAN=DE A1 Li, Xiao A1 Petrov, Ivan A1 Hultman, Lars A1 Greczynski, Grzegorz PB Linköpings universitet, Tunnfilmsfysik; Linköpings universitet, Tekniska fakulteten; Univ Illinois, IL 61801 USA; A V S AMER INST PHYSICS YR 2023 K1 Inorganic Chemistry K1 Oorganisk kemi JF Journal of Vacuum Science & Technology. A. Vacuum, Surfaces, and Films, 0734-2101, 2023, 41:1, LK http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-191188 DO http://urn.kb.se/resolve?urn=urn:nbn:se:liu:diva-191188 SF ELIB - SuUB Bremen
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