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1 Ergebnisse
1
Single-Grain Gate-All-Around Si Nanowire FET Using Low-Ther..:
Tung-Ying Hsieh
;
Ping-Yi Hsieh
;
Chih-Chao Yang
...
A:Physics. , 2020
Link:
https://doi.org/10.3390/mi11080741
RT Journal T1
Single-Grain Gate-All-Around Si Nanowire FET Using Low-Thermal-Budget Processes for Monolithic Three-Dimensional Integrated Circuits
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2072-666X_11_8_741_&Exemplar=1&LAN=DE A1 Tung-Ying Hsieh A1 Ping-Yi Hsieh A1 Chih-Chao Yang A1 Chang-Hong Shen A1 Jia-Min Shieh A1 Wen-Kuan Yeh A1 Meng-Chyi Wu PB Multidisciplinary Digital Publishing Institute YR 2020 K1 monolithic 3D K1 gate-all-around K1 nanowire FET K1 low-thermal budget K1 location-controlled-grain K1 laser crystallization K1 laser activation K1 laser-assisted salicidation K1 low power consumption JF A:Physics LK http://dx.doi.org/https://doi.org/10.3390/mi11080741 DO https://doi.org/10.3390/mi11080741 SF ELIB - SuUB Bremen
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