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1 Ergebnisse
1
Static High Voltage Actuation of Piezoelectric AlN and AlSc..:
Chris Stoeckel
;
Katja Meinel
;
Marcel Melzer
...
D:Materials and Processing. , 2022
Link:
https://doi.org/10.3390/mi13040625
RT Journal T1
Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2072-666X_13_4_625_&Exemplar=1&LAN=DE A1 Chris Stoeckel A1 Katja Meinel A1 Marcel Melzer A1 Agnė Žukauskaitė A1 Sven Zimmermann A1 Roman Forke A1 Karla Hiller A1 Harald Kuhn PB Multidisciplinary Digital Publishing Institute YR 2022 K1 AlN K1 AlScN K1 aluminum nitride K1 aluminum scandium nitride K1 micromirror K1 microscanner K1 piezoelectric JF D:Materials and Processing LK http://dx.doi.org/https://doi.org/10.3390/mi13040625 DO https://doi.org/10.3390/mi13040625 SF ELIB - SuUB Bremen
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