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1 Ergebnisse
1
Wafer-Scale Fabrication of Ultra-High Aspect Ratio, Microsc..:
Xiaomeng Zhang
;
Chuhao Yao
;
Jiebin Niu
..
D:Materials and Processing. , 2023
Link:
https://doi.org/10.3390/mi14010179
RT Journal T1
Wafer-Scale Fabrication of Ultra-High Aspect Ratio, Microscale Silicon Structures with Smooth Sidewalls Using Metal Assisted Chemical Etching
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2072-666X_14_1_179_&Exemplar=1&LAN=DE A1 Xiaomeng Zhang A1 Chuhao Yao A1 Jiebin Niu A1 Hailiang Li A1 Changqing Xie PB Multidisciplinary Digital Publishing Institute YR 2023 K1 ultra-high aspect ratio K1 microscale silicon structures K1 MacEtch K1 sidewall roughness JF D:Materials and Processing LK http://dx.doi.org/https://doi.org/10.3390/mi14010179 DO https://doi.org/10.3390/mi14010179 SF ELIB - SuUB Bremen
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