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Surface Passivation of Germanium with ALD Al2O3: Impact of ..:
Joonas Isometsä
;
Zahra Jahanshah Rad
;
Tsun H. Fung
...
Inorganic Crystalline Materials. , 2023
Link:
https://doi.org/10.3390/cryst13040667
RT Journal T1
Surface Passivation of Germanium with ALD Al2O3: Impact of Composition and Crystallinity of GeOx Interlayer
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2073-4352_13_4_667_&Exemplar=1&LAN=DE A1 Joonas Isometsä A1 Zahra Jahanshah Rad A1 Tsun H. Fung A1 Hanchen Liu A1 Juha-Pekka Lehtiö A1 Toni P. Pasanen A1 Oskari Leiviskä A1 Mikko Miettinen A1 Pekka Laukkanen A1 Kalevi Kokko A1 Hele Savin A1 Ville Vähänissi PB Multidisciplinary Digital Publishing Institute YR 2023 K1 surface passivation K1 atomic layer deposition K1 aluminum oxide K1 ultrahigh vacuum K1 corona oxide characterization of semiconductors K1 quasi-steady-state microwave-detected photoconductance decay K1 germanium K1 X-ray photoelectron spectroscopy K1 low-energy electron diffraction JF Inorganic Crystalline Materials LK http://dx.doi.org/https://doi.org/10.3390/cryst13040667 DO https://doi.org/10.3390/cryst13040667 SF ELIB - SuUB Bremen
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