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1 Ergebnisse
1
Investigation of the Influence of Sublayer Thickness on Pai..:
Basma Elsaka
;
Philipp Kästner
;
Eireen Käkel
..
Nanotechnology and Applied Nanosciences. , 2023
Link:
https://doi.org/10.3390/app13031538
RT Journal T1
Investigation of the Influence of Sublayer Thickness on Pairing of Metallic MEMS Shutter Blades
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2076-3417_13_3_1538_&Exemplar=1&LAN=DE A1 Basma Elsaka A1 Philipp Kästner A1 Eireen Käkel A1 Roland Donatiello A1 Hartmut Hillmer PB Multidisciplinary Digital Publishing Institute YR 2023 K1 MEMS structure K1 microshutter blades K1 Casimir effect K1 3D self-assembly K1 tight attachment K1 thin film layers K1 stress K1 curling JF Nanotechnology and Applied Nanosciences LK http://dx.doi.org/https://doi.org/10.3390/app13031538 DO https://doi.org/10.3390/app13031538 SF ELIB - SuUB Bremen
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