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1 Ergebnisse
1
Study of Selective Dry Etching Effects of 15-Cycle Si0.7Ge0..:
Enxu Liu
;
Junjie Li
;
Na Zhou
...
Nanoelectronics, Nanosensors and Devices. , 2023
Link:
https://doi.org/10.3390/nano13142127
RT Journal T1
Study of Selective Dry Etching Effects of 15-Cycle Si0.7Ge0.3/Si Multilayer Structure in Gate-All-Around Transistor Process
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2079-4991_13_14_2127_&Exemplar=1&LAN=DE A1 Enxu Liu A1 Junjie Li A1 Na Zhou A1 Rui Chen A1 Hua Shao A1 Jianfeng Gao A1 Qingzhu Zhang A1 Zhenzhen Kong A1 Hongxiao Lin A1 Chenchen Zhang A1 Panpan Lai A1 Chaoran Yang A1 Yang Liu A1 Guilei Wang A1 Chao Zhao A1 Tao Yang A1 Huaxiang Yin A1 Junfeng Li A1 Jun Luo A1 Wenwu Wang PB Multidisciplinary Digital Publishing Institute YR 2023 K1 GAA K1 selective etch K1 silicon germanium K1 etch effect K1 process simulation JF Nanoelectronics, Nanosensors and Devices LK http://dx.doi.org/https://doi.org/10.3390/nano13142127 DO https://doi.org/10.3390/nano13142127 SF ELIB - SuUB Bremen
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