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1 Ergebnisse
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Increasing the Stability of Isolated and Dense High-Aspect-..:
Michael J. Haslinger
;
Oliver S. Maier
;
Markus Pribyl
...
Nanofabrication and Nanomanufacturing. , 2023
Link:
https://doi.org/10.3390/nano13091556
RT Journal T1
Increasing the Stability of Isolated and Dense High-Aspect-Ratio Nanopillars Fabricated Using UV-Nanoimprint Lithography
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2079-4991_13_9_1556_&Exemplar=1&LAN=DE A1 Michael J. Haslinger A1 Oliver S. Maier A1 Markus Pribyl A1 Philipp Taus A1 Sonja Kopp A1 Heinz D. Wanzenboeck A1 Kurt Hingerl A1 Michael M. Muehlberger A1 Elena Guillén PB Multidisciplinary Digital Publishing Institute YR 2023 K1 nanoimprint lithography K1 nanopattern transfer K1 aspect ratio K1 high aspect ratio K1 nanopillars K1 simulations for nanoimprinting K1 nanoneedles K1 FEBID K1 black silicon K1 nanostructuring K1 nanoelectrode K1 UV-NIL K1 nanoscale metal pattern JF Nanofabrication and Nanomanufacturing LK http://dx.doi.org/https://doi.org/10.3390/nano13091556 DO https://doi.org/10.3390/nano13091556 SF ELIB - SuUB Bremen
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