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Structural Properties and Oxidation Resistance of ZrN/SiNx,..:
Ihar Saladukhin
;
Gregory Abadias
;
Vladimir Uglov
...
https://dx.doi.org/10.3390/coatings10020149. , 2020
Link:
https://doi.org/10.3390/coatings10020149
RT Journal T1
Structural Properties and Oxidation Resistance of ZrN/SiNx, CrN/SiNx and AlN/SiNx Multilayered Films Deposited by Magnetron Sputtering Technique
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2079-6412_10_2_149_&Exemplar=1&LAN=DE A1 Ihar Saladukhin A1 Gregory Abadias A1 Vladimir Uglov A1 Sergey Zlotski A1 Arno Janse van Vuuren A1 Jacques Herman O'Connell PB Multidisciplinary Digital Publishing Institute YR 2020 K1 multilayered film K1 metal nitride K1 silicon nitride K1 oxidation JF https://dx.doi.org/10.3390/coatings10020149 LK http://dx.doi.org/https://doi.org/10.3390/coatings10020149 DO https://doi.org/10.3390/coatings10020149 SF ELIB - SuUB Bremen
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