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1 Ergebnisse
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Measurement of Ion Energy Distribution and Deposition of Ti..:
Dae-Chul Kim
;
Young-Woo Kim
;
Yong-Hyun Kim
...
Surface Characterization, Deposition and Modification. , 2021
Link:
https://doi.org/10.3390/coatings11080904
RT Journal T1
Measurement of Ion Energy Distribution and Deposition of Ti Thin Films Using ABPPS Technology on Glass Substrate
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2079-6412_11_8_904_&Exemplar=1&LAN=DE A1 Dae-Chul Kim A1 Young-Woo Kim A1 Yong-Hyun Kim A1 Jong-Bae Park A1 Jong-Sik Kim A1 Duk-Sun Han PB Multidisciplinary Digital Publishing Institute YR 2021 K1 ion energy distributions K1 reverse bias voltage K1 surface cleaning K1 Ti thin films JF Surface Characterization, Deposition and Modification LK http://dx.doi.org/https://doi.org/10.3390/coatings11080904 DO https://doi.org/10.3390/coatings11080904 SF ELIB - SuUB Bremen
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