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1 Ergebnisse
1
Reliability Enhancement of 14 nm HPC ASIC Using Al2O3 Thin ..:
Po-Chou Chen
;
Shu-Mei Chang
;
Hao-Chung Kuo
...
Surface Characterization, Deposition and Modification. , 2022
Link:
https://doi.org/10.3390/coatings12091308
RT Journal T1
Reliability Enhancement of 14 nm HPC ASIC Using Al2O3 Thin Film Coated with Room-Temperature Atomic Layer Deposition
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2079-6412_12_9_1308_&Exemplar=1&LAN=DE A1 Po-Chou Chen A1 Shu-Mei Chang A1 Hao-Chung Kuo A1 Fu-Cheng Chang A1 Yu-An Li A1 Chao-Cheng Ting PB Multidisciplinary Digital Publishing Institute YR 2022 K1 room temperature-ALD K1 high-performance computing K1 ASIC K1 wear-out test K1 uHAST JF Surface Characterization, Deposition and Modification LK http://dx.doi.org/https://doi.org/10.3390/coatings12091308 DO https://doi.org/10.3390/coatings12091308 SF ELIB - SuUB Bremen
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