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Effect of the RF Power of PECVD on the Crystalline Fraction..:
Mario Moreno
;
Arturo Torres-Sánchez
;
Pedro Rosales
...
https://dx.doi.org/10.3390/electronicmat4030009. , 2023
Link:
https://doi.org/10.3390/electronicmat4030009
RT Journal T1
Effect of the RF Power of PECVD on the Crystalline Fractions of Microcrystalline Silicon (μc-Si:H) Films and Their Structural, Optical, and Electronic Properties
UL https://suche.suub.uni-bremen.de/peid=base-ftmdpi:oai:mdpi.com:_2673-3978_4_3_9_&Exemplar=1&LAN=DE A1 Mario Moreno A1 Arturo Torres-Sánchez A1 Pedro Rosales A1 Alfredo Morales A1 Alfonso Torres A1 Javier Flores A1 Luis Hernández A1 Carlos Zúñiga A1 Carlos Ascencio A1 Alba Arenas PB Multidisciplinary Digital Publishing Institute YR 2023 K1 microcrystalline silicon K1 plasma-enhanced chemical vapor deposition K1 transmission electron microscopy K1 scanning electron microscopy JF https://dx.doi.org/10.3390/electronicmat4030009 LK http://dx.doi.org/https://doi.org/10.3390/electronicmat4030009 DO https://doi.org/10.3390/electronicmat4030009 SF ELIB - SuUB Bremen
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