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1 Ergebnisse
1
A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC..:
Gokce, Furkan
;
Aydın, Eren
;
Kangül, Mustafa
...
Gokce F., Aydin E., Kangul M., Toral T. B. , Zorlu O., Sardan-Sukas O., KÜLAH H., "A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS", 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Tayvan, 18 - 22 Haziran 2017, ss.1195-1198. , 2017
Link:
https://hdl.handle.net/11511/55535
RT Journal T1 <Title>A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftmetuankair:oai:https:__open.metu.edu.tr:11511_55535&Exemplar=1&LAN=DE A1 Gokce, Furkan A1 Aydın, Eren A1 Kangül, Mustafa A1 Toral, Taylan B A1 Zorlu, Ozge A1 Sardan-Sukas, Ozlem A1 Külah, Haluk YR 2017 K1 Parylene Bonding K1 Bio-MEMS K1 Gravimetric Sensors K1 Fabrication K1 Parylene Membrane K1 Lateral Mode Resonators JF Gokce F., Aydin E., Kangul M., Toral T. B. , Zorlu O., Sardan-Sukas O., KÜLAH H., "A PARYLENE BONDING BASED FABRICATION METHOD FOR GRAVIMETRIC RESONANT BASED MASS SENSORS", 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers), Kaohsiung, Tayvan, 18 - 22 Haziran 2017, ss.1195-1198 LK http://dx.doi.org/https://hdl.handle.net/11511/55535 DO https://hdl.handle.net/11511/55535 SF ELIB - SuUB Bremen
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