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Comparison of Two Alternative Fabrication Processes for a T..:

Tez, S ; Akın, Tayfun
Tez S., Akin T., "Comparison of Two Alternative Fabrication Processes for a Three-Axis Capacitive MEMS Accelerometer", 26th European Conference on Solid-State Transducers (Eurosensors), Krakow, Polonya, 9 - 12 Eylül 2012, cilt.47, ss.342-345.  , 2012
Link: https://hdl.handle.net/11511/35717