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1 Ergebnisse
1
Analysis and Elimination of the Capacitive Feedthrough Curr..:
Kangul, Mustafa
;
Aydin, Eren
;
Gokce, Furkan
..
Kangul M., Aydin E., Gokce F., Zorlu O., KÜLAH H., "Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.26, ss.1272-1278, 2017. , 2017
Link:
https://hdl.handle.net/11511/41346
RT Journal T1 <Title>Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors</Title> UL https://suche.suub.uni-bremen.de/peid=base-ftmetuankair:oai:open.metu.edu.tr:11511_41346&Exemplar=1&LAN=DE A1 Kangul, Mustafa A1 Aydin, Eren A1 Gokce, Furkan A1 Zorlu, Ozge A1 Külah, Haluk PB JOURNAL OF MICROELECTROMECHANICAL SYSTEMS YR 2017 JF Kangul M., Aydin E., Gokce F., Zorlu O., KÜLAH H., "Analysis and Elimination of the Capacitive Feedthrough Current on Electrostatically Actuated and Sensed Resonance-Based MEMS Sensors", JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, cilt.26, ss.1272-1278, 2017 LK http://dx.doi.org/https://hdl.handle.net/11511/41346 DO https://hdl.handle.net/11511/41346 SF ELIB - SuUB Bremen
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