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1 Ergebnisse
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A Study of Tungsten Metallization for the Advanced BEOL Int..:
Chen, James Hsueh-Chung
;
Fan, Susan Su-Chen
;
Standaert, Theodorus E
..
urn:nbn:de:bsz:ch1-qucosa-206986. , 2016
Link:
https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-20..
RT Journal T1
A Study of Tungsten Metallization for the Advanced BEOL Interconnections
UL https://suche.suub.uni-bremen.de/peid=base-ftmonarchchem:oai:qucosa:de:qucosa:20505&Exemplar=1&LAN=DE A1 Chen, James Hsueh-Chung A1 Fan, Susan Su-Chen A1 Standaert, Theodorus E A1 Spooner, Terry A A1 Paruchuri, Vamsi PB Technische Universität Chemnitz YR 2016 K1 info:eu-repo/classification/ddc/620 K1 ddc:620 K1 Kupfer K1 Wolfram K1 Metallisieren K1 copper K1 interconnect K1 tungsten K1 10 nm JF urn:nbn:de:bsz:ch1-qucosa-206986 LK http://dx.doi.org/https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-207035 DO https://nbn-resolving.org/urn:nbn:de:bsz:ch1-qucosa-207035 SF ELIB - SuUB Bremen
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