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1 Ergebnisse
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PECVD and PEALD on polymer substrates (part I): Fundamental..:
de los Arcos, Teresa
;
Awakowicz, Peter
;
Jenderny, Jonathan
...
info:eu-repo/semantics/altIdentifier/doi/10.1002/ppap.202300150. , 2023
Link:
https://publications.rwth-aachen.de/record/973558
RT Journal T1
PECVD and PEALD on polymer substrates (part I): Fundamentals and analysis of plasma activation and thin film growth
UL https://suche.suub.uni-bremen.de/peid=base-ftrwthaachenpubl:oai:publications.rwth-aachen.de:973558&Exemplar=1&LAN=DE A1 de los Arcos, Teresa A1 Awakowicz, Peter A1 Jenderny, Jonathan A1 von Keudell, Achim A1 Kühne, Thomas D A1 Kusmierz, Simon A1 Müller, Hendrik A1 Mussenbrock, Thomas A1 Trieschmann, Jan A1 Zanders, David A1 Zysk, Frederik A1 Grundmeier, Guido A1 Benedikt, Jan A1 Biskup, Beatrix A1 Böke, Marc A1 Boysen, Nils A1 Buschhaus, Rahel A1 Dahlmann, Rainer A1 Devi, Anjana A1 Gergs, Tobias PB Wiley-VCH YR 2023 K1 info:eu-repo/classification/ddc/540 JF info:eu-repo/semantics/altIdentifier/doi/10.1002/ppap.202300150 LK http://dx.doi.org/https://publications.rwth-aachen.de/record/973558 DO https://publications.rwth-aachen.de/record/973558 SF ELIB - SuUB Bremen
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