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Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Open..:

Kristina Ashurbekova (10032043) ; Karina Ashurbekova (10032046) ; Iva Saric (3130365)...
https://figshare.com/articles/journal_contribution/Ultrathin_Hybrid_SiAlCOH_Dielectric_Films_through_Ring-Opening_Molecular_Layer_Deposition_of_Cyclic_Tetrasiloxane/13640656. , 2021

Link: https://doi.org/10.1021/acs.chemmater.0c04408.s001

RT Journal
T1 <Title>Ultrathin Hybrid SiAlCOH Dielectric Films through Ring-Opening Molecular Layer Deposition of Cyclic Tetrasiloxane</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_13640656&Exemplar=1&LAN=DE
				
A1 Kristina Ashurbekova (10032043)
A1 Karina Ashurbekova (10032046)
A1 Iva Saric (3130365)
A1 Marco Gobbi (212235)
A1 Evgeny Modin (3685624)
A1 Andrey Chuvilin (525005)
A1 Mladen Petravic (3130368)
A1 Ilmutdin Abdulagatov (10032049)
A1 Mato Knez (1524676)
YR 2021
K1 Biophysics
K1 Biochemistry
K1 Microbiology
K1 Biotechnology
K1 Cancer
K1 Chemical Sciences not elsewhere classified
K1 Physical Sciences not elsewhere classified
K1 self-limiting surface chemistry
K1 field-effect transistors
K1 siloxane-alumina film
K1 vapor phase approach
K1 XPS
K1 HRTEM
K1 V 4 D 4
K1 mass increase
K1 X-ray reflectivity
K1 Ring-Opening Molecular Layer Deposition
K1 reflectance Fourier
K1 Ultrathin Hybrid SiAlCOH Dielectric
K1 molecular-level thickness control
K1 QCM study
K1 processing temperature window
K1 XRR
K1 MV
K1 cm
K1 MLD cycles
K1 TMA
K1 ATR-FTIR
K1 12 nm
K1 quartz crystal microbalance
K1 ring-opening MLD process
K1 High-resolution transmission electr
K1 1.6 Å
K1 X-ray photoelectron spectroscopy
K1 polymer films
K1 Cyclic Tetrasiloxane Molecular laye
K1 flash memories
JF https://figshare.com/articles/journal_contribution/Ultrathin_Hybrid_SiAlCOH_Dielectric_Films_through_Ring-Opening_Molecular_Layer_Deposition_of_Cyclic_Tetrasiloxane/13640656
LK http://dx.doi.org/https://doi.org/10.1021/acs.chemmater.0c04408.s001
DO https://doi.org/10.1021/acs.chemmater.0c04408.s001
SF ELIB - SuUB Bremen

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