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Deep Learning-Based High Throughput Inspection in 3D Nanofa..:

Utkarsh Anand (1343049) ; Tanmay Ghosh (1681387) ; Zainul Aabdin (1343043)...
https://figshare.com/articles/media/Deep_Learning-Based_High_Throughput_Inspection_in_3D_Nanofabrication_and_Defect_Reversal_in_Nanopillar_Arrays_Implications_for_Next_Generation_Transistors/14188731. , 2021

Link: https://doi.org/10.1021/acsanm.0c03283.s002

RT Journal
T1 <Title>Deep Learning-Based High Throughput Inspection in 3D Nanofabrication and Defect Reversal in Nanopillar Arrays: Implications for Next Generation Transistors</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_14188731&Exemplar=1&LAN=DE
				
A1 Utkarsh Anand (1343049)
A1 Tanmay Ghosh (1681387)
A1 Zainul Aabdin (1343043)
A1 Nandi Vrancken (1435555)
A1 Hongwei Yan (1774468)
A1 XiuMei Xu (1853821)
A1 Frank Holsteyns (1853809)
A1 Utkur Mirsaidov (1343040)
YR 2021
K1 Biophysics
K1 Cell Biology
K1 Biotechnology
K1 Space Science
K1 Environmental Sciences not elsewhere classified
K1 Biological Sciences not elsewhere classified
K1 Physical Sciences not elsewhere classified
K1 3 D Nanofabrication
K1 HAR
K1 surface SiO 2 layer
K1 machine learning-based approach
K1 Deep Learning-Based High Throughput
K1 pattern collapse
K1 Next Generation Transistors Densely
K1 nanostructure
K1 future microelectronics components
K1 nanoscale semiconductor devices
JF https://figshare.com/articles/media/Deep_Learning-Based_High_Throughput_Inspection_in_3D_Nanofabrication_and_Defect_Reversal_in_Nanopillar_Arrays_Implications_for_Next_Generation_Transistors/14188731
LK http://dx.doi.org/https://doi.org/10.1021/acsanm.0c03283.s002
DO https://doi.org/10.1021/acsanm.0c03283.s002
SF ELIB - SuUB Bremen

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