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Surface Diffusion Control Enables Tailored-Aspect-Ratio Nan..:

Philip Klement (7146074) ; Daniel Anders (10653010) ; Lukas Gümbel (10653013)...
https://figshare.com/articles/journal_contribution/Surface_Diffusion_Control_Enables_Tailored-Aspect-Ratio_Nanostructures_in_Area-Selective_Atomic_Layer_Deposition/14423617. , 2021

Link: https://doi.org/10.1021/acsami.0c22121.s001

RT Journal
T1 <Title>Surface Diffusion Control Enables Tailored-Aspect-Ratio Nanostructures in Area-Selective Atomic Layer Deposition</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_14423617&Exemplar=1&LAN=DE
				
A1 Philip Klement (7146074)
A1 Daniel Anders (10653010)
A1 Lukas Gümbel (10653013)
A1 Michele Bastianello (10653016)
A1 Fabian Michel (10653019)
A1 Jörg Schörmann (1466329)
A1 Matthias T. Elm (1466332)
A1 Christian Heiliger (1515001)
A1 Sangam Chatterjee (1493074)
YR 2021
K1 Cell Biology
K1 Evolutionary Biology
K1 Immunology
K1 Inorganic Chemistry
K1 Chemical Sciences not elsewhere classified
K1 Area-Selective Atomic Layer Deposit
K1 layer deposition
K1 surface modifications
K1 selectivity
K1 Kinetic Monte-Carlo calculations
K1 surface diffusion
K1 Surface Diffusion Control Enables T
K1 block precursor adsorption
K1 SiO 2 yields
K1 area-selective deposition processes
K1 surface diffusion effects
JF https://figshare.com/articles/journal_contribution/Surface_Diffusion_Control_Enables_Tailored-Aspect-Ratio_Nanostructures_in_Area-Selective_Atomic_Layer_Deposition/14423617
LK http://dx.doi.org/https://doi.org/10.1021/acsami.0c22121.s001
DO https://doi.org/10.1021/acsami.0c22121.s001
SF ELIB - SuUB Bremen

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