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Nanomechanical Characterization of Organic Surface Passivat..:

Mattia Pasquali (10955103) ; Stefanie Sergeant (3915995) ; Thierry Conard (1689082)...
https://figshare.com/articles/journal_contribution/Nanomechanical_Characterization_of_Organic_Surface_Passivation_Films_on_50_nm_Patterns_during_Area-Selective_Deposition/14766360. , 2021

Link: https://doi.org/10.1021/acsaelm.1c00219.s001

RT Journal
T1 <Title>Nanomechanical Characterization of Organic Surface Passivation Films on 50 nm Patterns during Area-Selective Deposition</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_14766360&Exemplar=1&LAN=DE
				
A1 Mattia Pasquali (10955103)
A1 Stefanie Sergeant (3915995)
A1 Thierry Conard (1689082)
A1 Valentina Spampinato (1546753)
A1 Alessandro Viva (10955106)
A1 Stefan De Gendt (8316330)
A1 Silvia Armini (1853818)
YR 2021
K1 Medicine
K1 Biotechnology
K1 Environmental Sciences not elsewhere classified
K1 Biological Sciences not elsewhere classified
K1 Chemical Sciences not elsewhere classified
K1 Physical Sciences not elsewhere classified
K1 surface energy fluctuations
K1 adhesion force distribution
K1 Hf 3 N 4 ALD
K1 Area-Selective Deposition Area-sele
K1 top-down scanning electron microsco
K1 technique
K1 passivation layer
K1 50 nm Patterns
K1 ASD
K1 temperature-dependent self-assemble
K1 Organic Surface Passivation Films
K1 film
K1 force AFM-derived ODT coverage
K1 non-growth areas
K1 X-ray photoelectron spectroscopy
JF https://figshare.com/articles/journal_contribution/Nanomechanical_Characterization_of_Organic_Surface_Passivation_Films_on_50_nm_Patterns_during_Area-Selective_Deposition/14766360
LK http://dx.doi.org/https://doi.org/10.1021/acsaelm.1c00219.s001
DO https://doi.org/10.1021/acsaelm.1c00219.s001
SF ELIB - SuUB Bremen

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