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Scalable Nanoimprint Lithography Process for Manufacturing ..:

Vincent J. Einck (11251025) ; Mahsa Torfeh (8601066) ; Andrew McClung (8108363)...
https://figshare.com/articles/media/Scalable_Nanoimprint_Lithography_Process_for_Manufacturing_Visible_Metasurfaces_Composed_of_High_Aspect_Ratio_TiO_sub_2_sub_Meta-Atoms/15138263.  , 2021