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Chemical Probing of Water-Stable Methyl Species in Atomic L..:

Zhenyu Jin (424522) ; Suhyun Lee (1484431) ; Seokhee Shin (1604143)...
https://figshare.com/articles/journal_contribution/Chemical_Probing_of_Water-Stable_Methyl_Species_in_Atomic_Layer_Deposition_of_Al_sub_2_sub_O_sub_3_sub_from_Trimethylaluminum_and_Water/16696216. , 2021

Link: https://doi.org/10.1021/acs.jpcc.1c05889.s001

RT Journal
T1 <Title>Chemical Probing of Water-Stable Methyl Species in Atomic Layer Deposition of Al 2 O 3 from Trimethylaluminum and Water</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_16696216&Exemplar=1&LAN=DE
				
A1 Zhenyu Jin (424522)
A1 Suhyun Lee (1484431)
A1 Seokhee Shin (1604143)
A1 Da-Som Shin (9094580)
A1 Hyeri Choi (11476081)
A1 Yo-Sep Min (1604140)
YR 2021
K1 Ecology
K1 Developmental Biology
K1 Inorganic Chemistry
K1 Plant Biology
K1 Environmental Sciences not elsewhere classified
K1 Biological Sciences not elsewhere classified
K1 Chemical Sciences not elsewhere classified
K1 ∼ 2960 cm
K1 ∼ 1609 cm
K1 higher wavenumber compared
K1 atomic layer deposition
K1 asymmetric stretching mode
K1 situ ftir investigation
K1 3 </ sub
K1 2 </ sub
K1 produce surface hydroxyls
K1 persistent methyl groups
K1 persistent methyl species
K1 surface formate species
K1 stable methyl species
K1 form formate species
K1 water exposure step
K1 methyl species
K1 formate species
K1 situ fourier
K1 surface methylated
K1 sufficiently water
K1 several reports
K1 provide evidence
K1 plausible reaction
K1 observations made
K1 may explain
K1 generally believed
K1 chemically probed
K1 chemical probing
K1 chemical adsorption
JF https://figshare.com/articles/journal_contribution/Chemical_Probing_of_Water-Stable_Methyl_Species_in_Atomic_Layer_Deposition_of_Al_sub_2_sub_O_sub_3_sub_from_Trimethylaluminum_and_Water/16696216
LK http://dx.doi.org/https://doi.org/10.1021/acs.jpcc.1c05889.s001
DO https://doi.org/10.1021/acs.jpcc.1c05889.s001
SF ELIB - SuUB Bremen

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