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Inherently Selective Water-Free Deposition of Titanium Diox..:

Yunil Cho (11974241) ; Christopher F. Ahles (1618888) ; Jong Youn Choi (4092523)...
https://figshare.com/articles/journal_contribution/Inherently_Selective_Water-Free_Deposition_of_Titanium_Dioxide_on_the_Nanoscale_Implications_for_Nanoscale_Patterning/18737459. , 1753

Link: https://doi.org/10.1021/acsanm.1c03311.s001

RT Journal
T1 <Title>Inherently Selective Water-Free Deposition of Titanium Dioxide on the Nanoscale: Implications for Nanoscale Patterning</Title>

UL https://suche.suub.uni-bremen.de/peid=base-ftsmithonian:oai:figshare.com:article_18737459&Exemplar=1&LAN=DE
				
A1 Yunil Cho (11974241)
A1 Christopher F. Ahles (1618888)
A1 Jong Youn Choi (4092523)
A1 James Huang (1787539)
A1 Antony Jan (11974244)
A1 Keith Wong (228268)
A1 Srinivas Nemani (11209914)
A1 Ellie Yieh (11974247)
A1 Andrew C. Kummel (1511401)
YR 1753
K1 Cell Biology
K1 Molecular Biology
K1 Biotechnology
K1 Evolutionary Biology
K1 Ecology
K1 Cancer
K1 Inorganic Chemistry
K1 Chemical Sciences not elsewhere classified
K1 Physical Sciences not elsewhere classified
K1 nonreactive low -<
K1 effect transistor fabrication
K1 around 2 nm
K1 highest selectivity among
K1 displayed similar selectivity
K1 nanoscale patterning process
K1 nanoscale patterned samples
K1 titanium ( iv
K1 using ti (
K1 titanium precursor used
K1 400 pulses )
K1 250 ° c
K1 1 nm tio
K1 either acetic acid
K1 nanoscale patterning water
K1 4 </ sub
K1 2 </ sub
K1 inherently selective water
K1 pr )< sub
K1 precursor pulsed cvd
K1 ti (
K1 acetic acid
K1 titanium dioxide
K1 increase selectivity
K1 selective water
K1 second precursor
K1 pulsed cvd
K1 precursor cvd
K1 cvd )
K1 2000 pulses
K1 selective tio
K1 formic acid
K1 situ </
K1 k </
K1 sup ><
K1 square roughness
K1 semiconductor field
K1 form tio
K1 dielectric material
K1 aco –
K1 ></ sup
JF https://figshare.com/articles/journal_contribution/Inherently_Selective_Water-Free_Deposition_of_Titanium_Dioxide_on_the_Nanoscale_Implications_for_Nanoscale_Patterning/18737459
LK http://dx.doi.org/https://doi.org/10.1021/acsanm.1c03311.s001
DO https://doi.org/10.1021/acsanm.1c03311.s001
SF ELIB - SuUB Bremen

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