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KrF laser with a power of 100 W:

Panchenko, Yury Nikolaevich ; Andreev, Mikhail Vladimirovich ; Losev, Valery Fedorovich.
Proceedings of SPIE. Vol. 9810 : Atomic and Molecular Pulsed Lasers XII. — Bellingham, 2015..  , 2015
Link: http://earchive.tpu.ru/handle/11683/17660