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Improvement of Thermal Cycling Resistance of AlxSi1−xN Coat..:
Panin, Alexey Viktorovich
;
Shugurov, Artur Rubinovich
;
Kazachenok, Marina Sergeevna
.
Improvement of Thermal Cycling Resistance of AlxSi1−xN Coatings on Cu Substrates by Optimizing Al/Si Ratio / A. V. Panin [et al.] // Materials. — 2019. — Vol. 12, iss. 14. — [2249, 12 p.].. , 2019
Link:
http://earchive.tpu.ru/handle/11683/57276
RT Journal T1 <Title>Improvement of Thermal Cycling Resistance of AlxSi1−xN Coatings on Cu Substrates by Optimizing Al/Si Ratio</Title> UL https://suche.suub.uni-bremen.de/peid=base-fttomskpuniv:oai:earchive.tpu.ru:11683_57276&Exemplar=1&LAN=DE A1 Panin, Alexey Viktorovich A1 Shugurov, Artur Rubinovich A1 Kazachenok, Marina Sergeevna A1 Sergeev, Viktor Petrovich PB Томский политехнический университет YR 2019 K1 copper K1 magnetron sputtering K1 thermal cycling performance K1 scanning electron microscopy K1 cracking K1 медь K1 магнетронные покрытия JF Improvement of Thermal Cycling Resistance of AlxSi1−xN Coatings on Cu Substrates by Optimizing Al/Si Ratio / A. V. Panin [et al.] // Materials. — 2019. — Vol. 12, iss. 14. — [2249, 12 p.]. LK http://earchive.tpu.ru/handle/11683/57276 DO http://earchive.tpu.ru/handle/11683/57276 SF ELIB - SuUB Bremen
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